Application: Energy-saving glass, smart glass, thin film PV
Physical Characteristics
| Parameters | Typical Value |
| Production Methodology | Shaping up by powder metallurgy, and bonded into AZO target with several segments. |
| Composition | 98wt%ZnO + 2wt%Al2O3 |
| Purity | >99.95wt% |
| Density | >5.52 g/cm3 (*Theoretical density: 5.58 g/cm3) |
| Electrical resistivity | ≤ 3×10-3 Ω·cm |
| Metal impurity | Fe ≤50ppm, Si ≤80ppm, Na ≤20ppm, Pb ≤30ppm, others ≤50ppm. Total ≤500ppm |
| Dimension | Planar target (50~300mm)L×(50~250mm)W×(4~15mm)H Rotary target (133~138mm)ID×(151~169mm)OD×(150~260mm)H |
| Bonding ratio | >95% |
| Product features: high density; The sputtering surface is smooth; Sufficient oxygen content, no need for oxygen sputtering | |
